Accelerated Shock Testing and Reliability Modeling for Micromechanical MEMS Devices
MEMS (Micro-Electro-Mechanical Systems) devices are miniature sensors or actuators fabricated using semiconductor manufacturing techniques, integrating microscopic mechanical structures and electronic circuitry on a single silicon chip. They use tiny moving elements such as beams, proof masses, diaphragms, or comb structures to sense or control physical… Read more